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Semiconductor Equipment
 

 

Semiconductor Equipment and Host Integration

Semiconductor Equipment Services
Equipment Control Services
Legacy Systems Services
Software & SECS GEM Training
RIOC
Robotics

Software Integration Services

  • Custom design and development of software for integrating semiconductor equipment with external hardware or software
  • Wafer Containment or Handling Systems
    (e.g. SMIF, FOUP, AGV, Lot ID, barcode, radio tag)
  • Manufacturing or work flow or execution planning or scheduling systems (e.g. MES, SECS GEM Host, VFEI)
  • Recipe Management or Process Program Management Systems
  • External Supervisory or Monitoring Systems

Software Modules for Integration

  • Recipe Management Systems
    • improvement in process yield and throughput
    • Intuitive Graphical User Interface (GUI) Design
    • Sufficient editable parameters to allow process engineers flexibility in "dialing in" the process
    • Version Control
    • Compatible for conversion to SECS "PPBODY" data item
  • GEM Compliance support
  • SECS GEM interfaces
    • Add to existing equipment
    • Multiplex Auxiliary Equipment into a single wire stream
  • Modifications
    • support new equipment process features
  • Support for fab work flow changes
    • SECS Message design for ease of integration to host system

Other Integration Services


 
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