Software Integration Services
- Custom design and development of software for integrating semiconductor equipment with external hardware or software
- Wafer Containment or Handling Systems
(e.g. SMIF, FOUP, AGV, Lot ID, barcode, radio tag)
- Manufacturing or work flow or execution planning or scheduling systems (e.g. MES, SECS GEM Host, VFEI)
- Recipe Management or Process Program Management Systems
- External Supervisory or Monitoring Systems
Software Modules for Integration
- Recipe Management Systems
- improvement in process yield and throughput
- Intuitive Graphical User Interface (GUI) Design
- Sufficient editable parameters to allow process engineers flexibility in "dialing in" the process
- Version Control
- Compatible for conversion to SECS "PPBODY" data item
- GEM Compliance support
- SECS GEM interfaces
- Add to existing equipment
- Multiplex Auxiliary Equipment into a single wire stream
- Modifications
- support new equipment process features
- Support for fab work flow changes
- SECS Message design for ease of integration to host system
Other Integration Services
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